SAPTEKA, Anak Agung Ngurah Gde; 						NAROTTAMA, Anak Agung Ngurah Made; 						YASA, Kadek Amerta.
Modelling of Phosphorus and Boron Doping Concentration on SOI Wafer Based Diffusion Process.
<strong>Logic : Jurnal Rancang Bangun dan Teknologi</strong>, [S.l.], v. 20, n. 1, p. 53-58, mar. 2020.
ISSN 2580-5649.
Available at: &lt;<a href="https://ojs.pnb.ac.id/index.php/LOGIC/article/view/1748" target="_new">https://ojs.pnb.ac.id/index.php/LOGIC/article/view/1748</a>&gt;. Date accessed: 26 apr. 2024.
doi: <a href="http://dx.doi.org/10.31940/logic.v20i1.1748">http://dx.doi.org/10.31940/logic.v20i1.1748</a>.