Sapteka, Anak Agung Ngurah Gde, Anak Agung Ngurah Made Narottama, & Kadek Amerta Yasa. "Modelling of Phosphorus and Boron Doping Concentration on SOI Wafer Based Diffusion Process." Logic : Jurnal Rancang Bangun dan Teknologi [Online], 20.1 (2020): 53-58. Web. 19 Apr. 2024