Sapteka, Anak Agung Ngurah Gde, 		Narottama, Anak Agung Ngurah Made, AND 		Yasa, Kadek Amerta.
"Modelling of Phosphorus and Boron Doping Concentration on SOI Wafer Based Diffusion Process" <em>Logic : Jurnal Rancang Bangun dan Teknologi</em> [Online], Volume 20 Number 1 (30 March 2020)